Micro-structuring of epoxy resists containing nanoparticles by proton beam writing-Reference-Cited by-同舟云学术

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Micro-structuring of epoxy resists containing nanoparticles by proton beam writing

Published:2017-08 Issue: Volume:404 Page:228-232
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Sano Ryo,Hayakawa Simon,Hayashi Hidetaka,Ishii Yasuyuki,Nishikawa Hiroyuki

Funder

MEXT

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference25 articles.

1. Proton beam writing

2. Resist materials for proton beam writing: A review

3. Micro-machining of resists on silicon by proton beam writing

4. Fabrication of three-dimensional structures of resist by proton beam writing

5. Three-dimensional silicon micromachining

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1. Evolution in Lithography Techniques: Microlithography to Nanolithography;Nanomaterials;2022-08-11

2. Preliminary study: Measurement of ion beam energy spreads produced by a Penning ionization gauge-type ion source using electromagnets for a mega-electron volt compact ion microbeam system;Review of Scientific Instruments;2020-04-01

3. Performance and application of heavy ion nuclear microbeam facility at the Nuclear Physics Institute in Řež, Czech Republic;Review of Scientific Instruments;2019-01

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