Micro-machining of resists on silicon by proton beam writing-Reference-Cited by-同舟云学术

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Micro-machining of resists on silicon by proton beam writing

Published:2007-07 Issue:1 Volume:260 Page:405-408
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Uchiya Naoyuki,Harada Takuya,Murai Masato,Nishikawa Hiroyuki,Haga Junji,Sato Takahiro,Ishii Yasuyuki,Kamiya Tomihiro

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference25 articles.

1. F. Watt, First International Workshop on Proton Beam writing, Book of abstracts, Singapore, July 2004.

2. Micromachining using focused high energy ion beams: Deep Ion Beam Lithography

3. Three-dimensional nanolithography using proton beam writing

4. Micromachining using deep ion beam lithography

Cited by 45 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Fabrication of engineered microplastics in an epoxy-based polymer (SU-8) by means of penetrating protons;Japanese Journal of Applied Physics;2024-02-23

2. Utilizing a photosensitive dry film resist in proton beam writing;Japanese Journal of Applied Physics;2022-03-24

3. Silver nanostructures embedding in polymethyl methacrylate patterns fabricated using proton beam writing;Surface and Interface Analysis;2020-02-24

4. Refractive index change and thermo-optic effect in polydimethylsiloxane nanocomposites with oxide nanoparticles induced by proton beam writing;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2019-11

5. Creation of silicon vacancy in silicon carbide by proton beam writing toward quantum sensing applications;Journal of Physics D: Applied Physics;2018-07-19

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