Demonstration of Thermo-Optic Switch Consisting of Mach-Zehnder Polymer Waveguide Drawn Using Focused Proton Beam

Author:

Miura Kenta1,Kiryu Hiromu1,Ozawa Yusuke1,Kubota Atsushi1,Hiratani Yuji2,Hanaizumi Osamu1,Satoh Takahiro3,Ishii Yasuyuki3,Kohka Masashi3,Takano Katsuyoshi4,Ohkubo Takeru3,Yamazaki Akiyoshi3,Kada Wataru1,Yokoyama Akihito3,Kamiya Tomihiro3

Affiliation:

1. Gunma University

2. Hiroshima International University

3. Japan Atomic Energy Agency

4. Osaka University

Abstract

We demonstrated a PMMA-based thermo-optic switch consisting of a Mach-Zehnder (MZ) type waveguide drawn by proton beam writing (PBW) and working at λ = 1.55 μm. The MZ waveguide was drawn by symmetrically coupling two Y junctions with a core width of 8 μm and a branching angle of 2°. A Ti thin-film heater and Al electrodes were formed on the surface of the MZ waveguide using conventional photolithography and wet-etching processes. An ON/OFF ratio of 9.0 dB and a switching power of 43.9 mW were obtained from the sample. The switching power is lower than for conventional commercial silica-based switches.

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. In situ ion-beam-induced luminescence analysis for evaluating a micrometer-scale radio-photoluminescence glass dosimeter;Japanese Journal of Applied Physics;2016-05-31

2. Fabrication and evaluation of flexible Mach–Zehnder waveguide structure embedded in a poly(dimethylsiloxane) thin film using a proton microbeam;Japanese Journal of Applied Physics;2016-05-20

3. Development of embedded Mach–Zehnder optical waveguide structures in polydimethylsiloxane thin films by proton beam writing;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2015-04

4. Development of microbeam technology to expand applications at TIARA;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2015-04

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