Demonstration of Thermo-Optic Switch Consisting of Mach-Zehnder Polymer Waveguide Drawn Using Focused Proton Beam
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Published:2013-12
Issue:
Volume:596
Page:134-138
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ISSN:1662-9795
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Container-title:Key Engineering Materials
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language:
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Short-container-title:KEM
Author:
Miura Kenta1, Kiryu Hiromu1, Ozawa Yusuke1, Kubota Atsushi1, Hiratani Yuji2, Hanaizumi Osamu1, Satoh Takahiro3, Ishii Yasuyuki3, Kohka Masashi3, Takano Katsuyoshi4, Ohkubo Takeru3, Yamazaki Akiyoshi3, Kada Wataru1, Yokoyama Akihito3, Kamiya Tomihiro3
Affiliation:
1. Gunma University 2. Hiroshima International University 3. Japan Atomic Energy Agency 4. Osaka University
Abstract
We demonstrated a PMMA-based thermo-optic switch consisting of a Mach-Zehnder (MZ) type waveguide drawn by proton beam writing (PBW) and working at λ = 1.55 μm. The MZ waveguide was drawn by symmetrically coupling two Y junctions with a core width of 8 μm and a branching angle of 2°. A Ti thin-film heater and Al electrodes were formed on the surface of the MZ waveguide using conventional photolithography and wet-etching processes. An ON/OFF ratio of 9.0 dB and a switching power of 43.9 mW were obtained from the sample. The switching power is lower than for conventional commercial silica-based switches.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
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