Fabrication and evaluation of flexible Mach–Zehnder waveguide structure embedded in a poly(dimethylsiloxane) thin film using a proton microbeam-Reference-Cited by-同舟云学术

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Fabrication and evaluation of flexible Mach–Zehnder waveguide structure embedded in a poly(dimethylsiloxane) thin film using a proton microbeam

Published:2016-05-20 Issue:6S1 Volume:55 Page:06GD01
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Parajuli Raj Kumar,Saruya Ryota,Akutzu Naoki,Miura Satoshi,Kada Wataru,Kawabata Shunsuke,Matsubara Yoshinori,Satoh Takahiro,Koka Masashi,Yamada Naoto,Kamiya Tomihiro,Miura Kenta,Hanaizumi Osamu

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

http://stacks.iop.org/1347-4065/55/i=6S1/a=06GD01/pdf

Reference32 articles.

1. Resist materials for proton beam writing: A review

2. ION BEAM LITHOGRAPHY AND NANOFABRICATION: A REVIEW

3. Resist materials for proton micromachining

4. High‐resolution, ion‐beam processes for microstructure fabrication

5. Ni electroplating on a resist micro-machined by proton beam writing

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Evaluation of the Induced Modification of a TiO₂/Polydimethylsiloxane Composite by Proton Beam;IEEJ Transactions on Fundamentals and Materials;2017

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