Self-Aligned Planar Metal Double-Gate Polycrystalline-Silicon Thin-Film Transistors Fabricated at Low Temperature on Glass Substrate-Reference-Cited by-同舟云学术

Self-Aligned Planar Metal Double-Gate Polycrystalline-Silicon Thin-Film Transistors Fabricated at Low Temperature on Glass Substrate

Published:2013 Issue:2 Volume:E96.C Page:285-288
ISSN:0916-8524
Container-title:IEICE Transactions on Electronics
language:en
Short-container-title:IEICE Trans. Electron.

Author:

OGATA Hiroyuki¹,ICHIJO Kenji¹,KONDO Kenji¹,HARA Akito¹

Affiliation:

1. Tohoku Gakuin University

Publisher

Institute of Electronics, Information and Communications Engineers (IEICE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.jstage.jst.go.jp/article/transele/E96.C/2/E96.C_285/_pdf

Reference13 articles.

1. [1] A.O. Adan, K. Suzuki, H. Shibayama, and R. Miyake, “A half-micron SRAM cell using a double-gated self-aligned polysilicon PMOS thin film transistor (TFT) load,” Tech. Dig. VLSI 1990 Tech., pp.19-20, 1990.

2. [2] A.O. Adan, S. Ono, H. Shibayama, and R. Miyake, “Analysis of submicron double-gated polysilicon MOS thin film transistors,” Tech. Dig. IEDM 1990, pp.399-402, 1990.

3. Kink-free polycrystalline silicon double-gate elevated-channel thin-film transistors

4. [4] K. Makihira, K. Nakagawa, and T. Asano, “Double-gate poly-Si thin-film transistors fabricated using self-aligned technology,” Tech. Dig. AM-LCD 2001, pp.243-246, 2001.

5. [5] S. Zhang, R. Han, J.K.O. Sin, and M. Chan, “A novel self-aligned double-gate TFT technology,” IEEE Electron Device Lett., vol.22, no.11, pp.530-532, 2001.

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3. Controllability of self-aligned four-terminal planar embedded metal double-gate low-temperature polycrystalline-silicon thin-film transistors on a glass substrate;Japanese Journal of Applied Physics;2016-02-05

4. Self-Aligned Four-Terminal Planar Metal Double-Gate Low-Temperature Polycrystalline-Silicon Thin-Film Transistors for System-on-Glass;IEICE Transactions on Electronics;2014