Direct Etching of Poly(methyl methacrylate) Using Laser Plasma Soft X-rays-Reference-Cited by-同舟云学术

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Direct Etching of Poly(methyl methacrylate) Using Laser Plasma Soft X-rays

Published:2010-06-04 Issue:6 Volume:3 Page:066502
ISSN:1882-0778
Container-title:Applied Physics Express
language:en
Short-container-title:Appl. Phys. Express

Author:

Torii Shuichi,Makimura Tetsuya,Okazaki Kouta,Nakamura Daisuke,Takahashi Akihiko,Okada Tatsuo,Niino Hiroyuki,Murakami Kouichi

Publisher

IOP Publishing

Subject

General Physics and Astronomy,General Engineering

Link

http://stacks.iop.org/1882-0786/3/i=6/a=066502/pdf

Reference15 articles.

1. Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)

2. Deep UV Ablation of PMMA Resists

3. Excimer laser etching of polymers

4. Surface changes of solids under intense EUV irradiation using a laser-plasma source

5. Micromachining of organic polymers by X-ray photo-etching using a 10Hz laser-plasma radiation source

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Micrometer-Scale Photo-Direct Machining of Polydimethylsiloxane Using Laser Plasma EUV Radiations;Springer Proceedings in Physics;2018

2. Dry photolithography through ultraviolet radiation-induced photo-etching of polymethyl methacrylate;Thin Solid Films;2016-09

3. Characteristics of the soft X-ray emission from laser-produced highly charged platinum plasmas;Applied Physics Express;2016-05-27

4. Micromachining Using Soft X-Rays from Laser-Produced Xe Plasma;Electronics and Communications in Japan;2016-01-08

5. Microprocessing using Soft X-ray from Laser Produced Xe Plasma;IEEJ Transactions on Electronics, Information and Systems;2014

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