Micrometer-Scale Photo-Direct Machining of Polydimethylsiloxane Using Laser Plasma EUV Radiations
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Publisher
Springer International Publishing
Link
http://link.springer.com/content/pdf/10.1007/978-3-319-73025-7_57
Reference11 articles.
1. Mosadegh, B., et al.: Uniform cell seeding and generation of overlapping gradient profiles in a multiplexed microchamber device with normally-closed valves. Lab Chip 10, 2959–2964 (2010)
2. Chen, W., et al.: Photolithographic surface micromachining of polydimethylsiloxane (PDMS). Lab Chip 12, 391–395 (2012)
3. Fukami, Y., et al.: Ablation of silicone rubber using UV-nanosecond and IR-femtosecond lasers. Jpn. J. Appl. Phys. 43, 4240–4241 (2004)
4. Makimura, T., et al.: Quartz micromachining using laser plasma soft X-rays and ultraviolet laser light. Appl. Phys. Lett. 85, 1274–1276 (2004)
5. Makimura, T., et al.: Direct micromachining of quartz glass plates using pulsed laser plasma soft X-rays. Appl. Phys. Lett. 86, 103111 (2005)
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