Periodic Cylindrical Structure of Micro-Swelling Silicone Rubber Fabricated by ArF Excimer Laser
Author:
Affiliation:
1. Department of Electrical and Electronic Engineering, National Defense Academy
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering
Link
https://www.jstage.jst.go.jp/article/ieejeiss/141/7/141_771/_pdf
Reference16 articles.
1. (1) T. Sato, A. Narazaki, and H. Niino : “Fabrication of micropits by LIBWE for laser marking of glass materials”, J. Laser Micro Nanoeng., Vol. 12, pp. 248-253 (2017)
2. (2) H. Urai, T. Makimura, and M. Ogawa : “Micrometer-scale photo-direct machining of polydimethylsiloxane using laser plasma EUV radiations”, X-Ray Lasers 2016. ICXRL 2016. Springer Proceedings in Physics, Vol. 202, pp. 383-386 (2018)
3. (3) K. Obata, S. Slobin, A. Schonewille, A. Hohnholz, C. Unger, J. Koch, O. Suttmann, and L. Overmeyer : “UV laser direct writing of 2D/3D structures using photo-curable polydimethylsiloxane (PDMS)”, Appl. Phys. A, Vol. 123, 495 (2017)
4. (4) T. Naruse and Y. Hanada : “Rapid, high-quality microfabrication of thermoset polymer PDMS using laser-induced bubbles”, Opt. Express, Vol. 27, pp. 9429-9438 (2019)
5. (5) Y. Nakajima, K. Obata, M. Machida, A. Hohnholz, J. Koch, O. Suttmann, and M. Terakawa : “Femtosecond-laser-based fabrication of metal/PDMS composite microstructures for mechanical force sensing”, Opt. Mater. Express, Vol. 7, pp. 4203-4213 (2017)
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