Excimer laser etching of polymers
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.336728
Reference24 articles.
1. Ultrafast High-Resolution Contact Lithography with Excimer Lasers
2. Ultrafast deep UV lithography using excimer lasers
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4. Contact lithography at 157 nm with an F2 excimer laser
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