Fabrication of Low-Residual-Stress AlN Thin Films and Their Application to Microgenerators for Vibration Energy Harvesting
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
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2. Effect of substrate type on the lattice structure of AlN thin films annealed at high temperature;Journal of Physics: Conference Series;2022-09-01
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4. Power density optimization for MEMS piezoelectric micro power generator below 100 Hz applications;Microsystem Technologies;2017-11-07
5. High-Throughput Investigation of a Lead-Free AlN-Based Piezoelectric Material, (Mg,Hf)xAl1–xN;ACS Combinatorial Science;2017-05-16
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