High-Throughput Investigation of a Lead-Free AlN-Based Piezoelectric Material, (Mg,Hf)xAl1–xN
Author:
Affiliation:
1. Department of Robotics, Tohoku University, 980-8577 Sendai, Japan
2. Advanced Institute for Materials Research (AIMR), Tohoku University, 980-8577 Sendai, Japan
Funder
Japan Science and Technology Agency
Publisher
American Chemical Society (ACS)
Subject
General Chemistry,General Medicine
Link
https://pubs.acs.org/doi/pdf/10.1021/acscombsci.6b00193
Reference36 articles.
1. Thin Film Piezoelectrics for MEMS
2. Highly piezoelectric co-doped AlN thin films for bulk acoustic wave resonators
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4. AlN-based surface acoustic wave resonators on platinum bottom electrodes for high-temperature sensing applications
5. Dielectric and thermal properties of AlN ceramics
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