AlN-based surface acoustic wave resonators on platinum bottom electrodes for high-temperature sensing applications-Reference-Cited by-同舟云学术

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AlN-based surface acoustic wave resonators on platinum bottom electrodes for high-temperature sensing applications

Published:2016-03-25 Issue:5 Volume:35 Page:408-411
ISSN:1001-0521
Container-title:Rare Metals
language:en
Short-container-title:Rare Met.

Author:

Li Chuan,Liu Xing-Zhao^ORCID,Peng Bin,Shu Lin,Li Yan-Rong

Funder

National Nature Science Foundation of China

Sichuan Youth Science and Technology Innovation Research Team Funding

Publisher

Springer Science and Business Media LLC

Subject

Materials Chemistry,Metals and Alloys,Physical and Theoretical Chemistry,Condensed Matter Physics

Link

http://link.springer.com/content/pdf/10.1007/s12598-016-0703-x.pdf

Reference21 articles.

1. Champbell CK. Surface Acoustic Wave Devices for Mobile and Wireless Communications. San Diego: Academic; 1998. 6.

2. Jiang Q, Yang XM, Zhou HG, Yang JS. Analysis of surface acoustic wave pressure sensors. Sens Actuators, A. 2005;118(1):1.

3. Canabal A, Davulis PM, Harris GM, da Cunha MP. High-temperature battery-free wireless microwave acoustic resonator sensor system. Electron Lett. 2010;46(7):471.

4. Shu L, Jiang JY, Peng B, Wang Y, Liu XZ. AlN film SAW resonator integrated with metal structure. Electron Lett. 2015;51(5):379.

5. Huang YS, Chen YY, Wu TT. A passive wireless hydrogen surface acoustic wave sensor based on Pt-coated ZnO nanorods. Nanotechnology. 2010;21(9):095503.

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