AlN film SAW resonator integrated with metal structure
Author:
Affiliation:
1. University of Electronic Science and Technology of ChinaChengdu610054SichuanPeople's Republic of China
Funder
National Natural Science Foundation of China
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1049/el.2014.3495
Reference12 articles.
1. High-Temperature Piezoelectric Sensing
2. Fastener Failure Detection Using a Surface Acoustic Wave Strain Sensor
3. Characterization of differentially measured strain using passive wireless surface acoustic wave (SAW) strain sensors;Stoney R.;IEEE Sens. J.,2014
4. Surface acoustic wave devices based on AlN/sapphire structure for high temperature applications
5. Measurements of the bulk, C-axis electromechanical coupling constant as a function of AlN film quality
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