Dielectric and thermal properties of AlN ceramics

Author:

Kume Shoichi,Yasuoka Masaki,Lee Sang-Kee,Kan Akinori,Ogawa Hirotaka,Watari Koji

Publisher

Elsevier BV

Subject

Materials Chemistry,Ceramics and Composites

Reference26 articles.

1. Influence of porosity on the dielectric properties of AlN in the range of 30 … 40 GHz;Heidinger;Powder Metall. Int.,1988

2. Enck, R. C., Harris, J. H., Youngman, R. A. and Nemecek, T. S., Process for making a low electrical resistively, high purity aluminum nitride electrostatic chuck, US Patent No. 6,017,485, January 25, 2000.

3. The dielectric behavior of commercial polycrystalline aluminium nitride;Gonzalez;Diamond Relat. Mater.,2000

4. Low dielectric loss ceramics of AlN fine and nanopowders;Fesenko;Powder Metall. Met. Ceram.,2002

5. Nishizono, K. and Oh, U., Radio wave transmittal substance and production method thereof, Japan Kokai Tokkyo Koho, Toku-Kai 2001-181049, July 3, 2001.

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