Piezoelectric Response to Pressure of Aluminum Nitride Thin Films Prepared on Nickel-Based Superalloy Diaphragms-Reference-Cited by-同舟云学术

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Piezoelectric Response to Pressure of Aluminum Nitride Thin Films Prepared on Nickel-Based Superalloy Diaphragms

Published:2006-06-08 Issue:6A Volume:45 Page:5169-5173
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Ohshima Ichiro,Akiyama Morito,Kakami Akira,Tabaru Tatsuo,Kamohara Toshihiro,Ooishi Yasunobu,Noma Hiroaki

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

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