Spin-on Metal Oxides and Their Applications for Next Generation Lithography
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Published:2016
Issue:1
Volume:29
Page:59-67
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ISSN:0914-9244
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Container-title:Journal of Photopolymer Science and Technology
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language:en
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Short-container-title:J. Photopol. Sci. Technol.
Author:
Yao Huirong1, Mullen Salem1, Wolfer Elizabeth1, Mckenzie Douglas1, Dioses Alberto1, Rahman Dalil1, Cho JoonYeon1, Padmanaban Munirathna1, Petermann Claire2, Hong SungEun2, Mannaert Geert3, Hopf Toby3, De Simone Danilo3, Vangoidsenhoven Diziana3, Lorant Christophe3, Sebaai Farid3, Sanchez Efrain Altamirano3
Affiliation:
1. EMD Performance Materials Corp. 2. Merck Performance Materials 3. IMEC
Publisher
Technical Association of Photopolymers, Japan
Subject
Materials Chemistry,Organic Chemistry,Polymers and Plastics
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