Functional Properties of Novel Metallic Hard Masks-Reference-Cited by-同舟云学术

Functional Properties of Novel Metallic Hard Masks

Published:2013 Issue:2 Volume:26 Page:231-238
ISSN:0914-9244
Container-title:Journal of Photopolymer Science and Technology
language:en
Short-container-title:J. Photopol. Sci. Technol.

Author:

Padmanaban Murirathna,Cho Joon Yeon,Yao Huirong,McKenzie Douglas,Dioses Alberto,Mullen Salem,Wolfer Elizabeth,Kurosawa Kazunori

Publisher

Technical Association of Photopolymers, Japan

Subject

Materials Chemistry,Organic Chemistry,Polymers and Plastics

Link

https://www.jstage.jst.go.jp/article/photopolymer/26/2/26_231/_pdf

Reference8 articles.

1. 1. D. J. Abdallah, D. McKenzie, A. Timko, A. Dioses, F. Houlihan, D. Rahman, S. Miyazaki, R.Zhang, W. Kim, H. Wu, L. Pylneva, P.-H. Lu, M. Neisser, R. R. Dammel, J. J. Biafore, Proc. SPIE, 6519 (2007) 65190M and references therein.

2. 2. T. Ouattara, C. Washburn, A. Collin, V. Krishnamurthy, D. Guerrero, M. Weigand, Proc. SPIE, 8322 (012) 83222E.

3. 3. M. Glodde, S. Engelmann, M. Guillorn, S. Kanagasabapathy, E. Mclellan, C-S. Koay, Y. Yin, M. Sankarapandian, J. C. Arnold, K. Petrillo, M. Brink, H. Miyazoe, E. Anjua de Silva, H. Yusuff, K. Yoon, Y. Wei, C-J Wu, P. Rao Varanasi., Proc. SPIE, 7972 (2011) 797216-1 to 8.

4. 4. Y. Wei, M. Glodde, H. Yusuff, M. Lawson, S-Y. Chang, K-S. Yoon, C-H. Wu and M. Kelling., Proc. of SPIE, 7972 (2011) 79722L-1 to 12.

5. 5. R. Zhang, A. G. Timko, J. Zook, Y. Wei, L. Pylneva, Y. Yi, C. Li, H. Wu, D. Rahman, D. S. Mckenzie, C. Anyadiegwu, P. Lu, M. Neisser, R. Dammel, R. Bradbury, T. Lee, Proc. SPIE, 7273 (2009)72732O.

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Development of TiO2 containing hardmasks through plasma-enhanced atomic layer deposition;Journal of Micro/Nanolithography, MEMS, and MOEMS;2017-05-23

2. Development of TiO2 containing hardmasks through PEALD deposition;SPIE Proceedings;2017-03-27

3. Spin-on metal oxide materials with high etch selectivity and wet strippability;SPIE Proceedings;2016-03-25

4. Spin-on Metal Oxides and Their Applications for Next Generation Lithography;Journal of Photopolymer Science and Technology;2016

5. Unique Characteristics of Metal-containing Film;Journal of Photopolymer Science and Technology;2016