Stress Measurements of Thermally Grown Thin Oxides on (100) Si Substrates-Reference-Cited by-同舟云学术

Stress Measurements of Thermally Grown Thin Oxides on (100) Si Substrates

Published:1989-11-01 Issue:11 Volume:136 Page:3433-3437
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:
Short-container-title:J. Electrochem. Soc.

Author:

Mack L. M.¹²¹,Reisman A.¹²¹,Bhattacharya P. K.¹²¹

Affiliation:

1. Microelectronics Center of North Carolina, Research Triangle Park, North Carolina 27709

2. North Carolina State University, Department of Electrical and Computer Engineering, Raleigh, North Carolina 27965

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Link

https://iopscience.iop.org/article/10.1149/1.2096466/pdf

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