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Effect of Bridging and Terminal Alkyl Groups on Structural and Mechanical Properties of Porous Organosilicate Films

  • Published:2017 Issue:10 Volume:6 Page:N182-N188
  • ISSN:2162-8769
  • Container-title:ECS Journal of Solid State Science and Technology
  • language:en
  • Short-container-title:ECS J. Solid State Sci. Technol.

Author:

Nenashev R.,Wang Yingjie,Liu Chunhui,Kotova N.,Vorotilov K.,Zhang Jing,Wei Shuhua,Seregin D.,Vishnevskiy A.,Leu Jihperng (Jim),Baklanov M. R.

Funder

Ministry of Education and Science of the Russian Federation

National Natural Science Foundation of China (NSFC)

Beijing Municipal Natural Science Foundation

Publisher

The Electrochemical Society

Subject

Electronic, Optical and Magnetic Materials

Cited by 24 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. THE SUBTRACTIVE PROCESS OF FORMING A METALLIZATION SYSTEM.;Электронная техника. Серия 3. Микроэлектроника;2023

2. СУБТРАКТИВНЫЙ ПРОЦЕСС ФОРМИРОВАНИЯ СИСТЕМЫ МЕТАЛЛИЗАЦИИ;Электронная техника. Серия 3. Микроэлектроника;2023

3. Modification of Porous Ultralow-k Film by Vacuum Ultraviolet Emission;ACS Applied Electronic Materials;2022-06-08

4. Effect of H atoms and UV wideband radiation on cured low-k OSG films;Journal of Physics D: Applied Physics;2022-04-01

5. Effect of surface hydrophobisation on the properties of a microporous phenylene-bridged organosilicate film;Journal of Non-Crystalline Solids;2022-01
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