Effect of surface hydrophobisation on the properties of a microporous phenylene-bridged organosilicate film

Author:

Vishnevskiy Alexey S.,Vorotyntsev Dmitry A.,Seregin Dmitry S.,Vorotilov Konstantin A.

Funder

Russian Foundation for Basic Research

Ministry of Education and Science of the Russian Federation

Publisher

Elsevier BV

Subject

Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference47 articles.

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3. Materials chemistry for low-k materials;Hatton;Mater. Today,2006

4. Cryogenic etching of porous low-k dielectrics in CF3Br and CF4 plasmas;Rezvanov;J. Vac. Sci. Technol. B,2017

5. Continuous formation of supported cubic and hexagonal mesoporous films by sol–gel dip-coating;Lu;Nature,1997

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