Author:
Vishnevskiy Alexey S.,Vorotyntsev Dmitry A.,Seregin Dmitry S.,Vorotilov Konstantin A.
Funder
Russian Foundation for Basic Research
Ministry of Education and Science of the Russian Federation
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference47 articles.
1. Advanced Interconnects for ULSI Technology;Baklanov,2012
2. Porous low dielectric constant materials for microelectronics;Baklanov;Philos. Trans. A Math. Phys. Eng. Sci.,2006
3. Materials chemistry for low-k materials;Hatton;Mater. Today,2006
4. Cryogenic etching of porous low-k dielectrics in CF3Br and CF4 plasmas;Rezvanov;J. Vac. Sci. Technol. B,2017
5. Continuous formation of supported cubic and hexagonal mesoporous films by sol–gel dip-coating;Lu;Nature,1997
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