Band Offsets for Atomic Layer Deposited HfSiO4 on (Al0.14Ga0.86)2O3

Author:

Fares ChakerORCID,Ren F.ORCID,Lambers Eric,Hays David C.,Gila B. P.,Pearton S. J.ORCID

Funder

DOD | Defense Threat Reduction Agency (DTRA)

Publisher

The Electrochemical Society

Subject

Electronic, Optical and Magnetic Materials

Reference50 articles.

1. Tadjer M. J. Mahadik N. A. Freitas J. A. Glaser E. R. Koehler A. D. Luna L. E. Feigelson B. N. Hobart K. D. Kub F. J. Kuramata A. , Ga2O3 Schottky barrier and heterojunction diodes for power electronics applications, Proc. SPIE 10532, GaN Materials and Devices XIII, 1053212 (2018).

2. Bayraktaroglu Burhan , Assessment of Gallium Oxide Technology,Devices for Sensing Branch Aerospace Components & Subsystems Division, AFRL-RY-WP-TR-2017-0167, August 2017, http://www.dtic.mil/dtic/tr/fulltext/u2/1038137.pdf

3. Okur Serdal Tompa Gary S. Sbrockey Nick Salagaj Tom Blank Volker Henninger Bernd Baldini Michele Wagner Günter Galazka Zbigniew Yao Yao Rokholt J. Davis Robert F. Porter Lisa M. Belkind Abraham , Vacuum Technology and Coating, May 2017, pp.31

4. A review of Ga2O3materials, processing, and devices

5. Guest Editorial: The dawn of gallium oxide microelectronics

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