Publisher
SPIE-Intl Soc Optical Eng
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference20 articles.
1. Step and flash imprint lithography: a new approach to high-resolution patterning
2. Template fabrication schemes for step and flash imprint lithography
3. UV NIL template making and imprint evaluation
4. S. V. Sreenivasan, P. Schumaker, B. Mokaberi-Nezhad, J. Choi, J. Perez, V. Truskett, F. Xu, and X, Lu , presented at the SPIE Advanced Lithography Symposium Conference, (2009).
Cited by
14 articles.
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