1. United Microelectronics Corporation, Fab12 Engineering, No. 18, Nan-Ke 2nd Road, Science-based Industrial Park, Hsin-Shi, Tainan 744, Taiwan
2. KLA-Tencor Israel, Optical Metrology Division Application, 1 Halavyan Street, Migdal Ha’emek, 23100, Israel
3. KLA-Tencor Korea, Optical Metrology Division Application, 7th Floor Star Plaza Building 92-7, Bansong-dong, Hwasung, Gyeonggi-do 445-160, Republic of Korea
4. KLA-Tencor Corporation United States, Optical Metrology Division Application, One Technology Drive, Milpitas, California 95035, United States
5. KLA-Tencor Taiwan, Optical Metrology Division Application, Tai Yuen Hi-Tech Industrial Park, No. 22 Taiyuan Street, Zhubei, ChuPei, HsinChu, Hsien, Hsinchu 302, Taiwan
6. Hitachi High-Technologies Corporation Japan, Metrology and Inspection Division, 24-14, Nishi-Shimbashi 1-chome, Minato-ku, Tokyo 105-8717, Japan
7. Hitachi High-Technologies Taiwan Corporation Taiwan, 1F, No. 12, Lane 31, Section 1, Huandong Road, Xinshi, Shiang, Tainan 744, Taiwan