Overlay accuracy fundamentals
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SPIE
Cited by 23 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Neural network driven sensitivity analysis of diffraction-based overlay metrology performance to target defect features;Measurement Science and Technology;2024-06-03
2. Designing Highly Precise Overlay Targets for Asymmetric Sidewall Structures Using Quasi-Periodic Line Widths and Finite-Difference Time-Domain Simulation;Sensors;2023-05-04
3. ADI to in-cell overlay stability improvement for DRAM using novel scatterometry and comprehensive process control;Metrology, Inspection, and Process Control XXXVII;2023-04-27
4. SEM ADI on device overlay: the advantages and outcome;Metrology, Inspection, and Process Control XXXVII;2023-04-27
5. Bottom grating asymmetry-induced inaccuracy in diffraction-based overlay measurement;Journal of Micro/Nanopatterning, Materials, and Metrology;2022-09-19
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