Indium nitride thin films prepared by radio‐frequency reactive sputtering
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.358480
Reference4 articles.
1. Electrical and Optical Properties of rf‐Sputtered GaN and InN
2. Mechanisms of reactive sputtering of indium I: Growth of InN in mixed Ar-N2 discharges
3. Morphology and structure of indium nitride films
4. Some properties of inn films prepared by reactive evaporation
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