Thickness-Dependent Growth Behaviors of Sputtered Amorphous InGaZnO Films Depending on the Substrates and Sputtering Conditions-Reference-Cited by-同舟云学术

Thickness-Dependent Growth Behaviors of Sputtered Amorphous InGaZnO Films Depending on the Substrates and Sputtering Conditions

Published:2023-11-28 Issue:12 Volume:5 Page:6686-6696
ISSN:2637-6113
Container-title:ACS Applied Electronic Materials
language:en
Short-container-title:ACS Appl. Electron. Mater.

Author:

Lee Sunjin¹²,Lee Yonghee¹,Kang Sukin¹,Mun Sahngik¹,Choi Jinheon¹,Hwang Cheol Seong¹^ORCID

Affiliation:

1. Department of Materials Science and Engineering and Inter-University Semiconductor Research Center, Seoul National University, Seoul 08826, Republic of Korea

2. SK Hynix Semiconductor, Inc., Icheon, Gyeonggi 17336, Republic of Korea

Funder

Next Generation Intelligence Semiconductor Foundation

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,Electrochemistry,Electronic, Optical and Magnetic Materials

Link

https://pubs.acs.org/doi/pdf/10.1021/acsaelm.3c01190

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