Comparative analysis on negative-bias-illumination-stress instabilities between planar- and vertical-channel thin-film transistors using InGaZnO active channels prepared by atomic-layer deposition
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Published:2024-10
Issue:
Volume:181
Page:108665
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ISSN:1369-8001
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Container-title:Materials Science in Semiconductor Processing
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language:en
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Short-container-title:Materials Science in Semiconductor Processing
Author:
Kang Ji-Won,
Lee Dong-Hee,
Kwon Young-Ha,
Seong Nak-Jin,
Choi Kyu-Jeong,
Hwang Chi-Sun,
Yoon Sung-MinORCID