Optimization of bimodal nitrogen concentration profiles in silicon oxynitrides
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.370890
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3. P-channel MOSFET's with ultrathin N/sub 2/O gate oxides
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5. Role of interfacial nitrogen in improving thin silicon oxides grown in N2O
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