Intense photoluminescence from amorphous tantalum oxide films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2219991
Reference21 articles.
1. Reactive sputtering deposition of low temperature tantalum suboxide thin films
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4. Crystallization effects in oxygen annealed Ta2O5 thin films on Si
5. Material constants of new piezoelectric Ta2O5thin films
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