1. School of Nano Technology and Nano Bionics, University of Science and Technology of China, Hefei 230026, People's Republic of China
2. Nanofabrication Facility of the Suzhou Institute of Nano-Tech and Nano-Bionics, CAS, Suzhou 215123, People's Republic of China
3. Institute of Microelectronics, Peking University, Beijing 100871, People's Republic of China
4. Suzhou Powerhouse Electronics Co., Ltd., Suzhou 215123, People's Republic of China