Growth of Si1−xGex(011) on Si(011)16×2 by gas-source molecular beam epitaxy: Growth kinetics, Ge incorporation, and surface phase transitions
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.369481
Reference31 articles.
1. Si(001)2×1 gas‐source molecular‐beam epitaxy from Si2H6: Growth kinetics and boron doping
2. Ge(001) gas‐source molecular beam epitaxy on Ge(001)2×1 and Si(001)2×1 from Ge2H6: Growth kinetics and surface roughening
3. Effects of H coverage on Ge segregation during Si1−xGex gas-source molecular beam epitaxy
4. Effects of H coverage on Ge segregation during Si1−xGex gas-source molecular beam epitaxy
5. Growth and band gap of strained 〈110〉 Si1−xGexlayers on silicon substrates by chemical vapor deposition
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