Elemental composition profiling in thin films by glow‐discharge mass spectrometry: Depth resolution-Reference-Cited by-同舟云学术

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Elemental composition profiling in thin films by glow‐discharge mass spectrometry: Depth resolution

Published:1975-07 Issue:7 Volume:46 Page:2828-2830
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Coburn J. W.,Eckstein E. W.,Kay Eric

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.322025

Reference9 articles.

1. Glow‐discharge mass spectrometry—Technique for determining elemental composition profiles in solids

2. A New Technique for the Elemental Analysis of Thin Surface Layers of Solids

3. PLASMA DIAGNOSTICS OF AN rf‐SPUTTERING GLOW DISCHARGE

4. Recent advances in epitaxy

5. Ion scattering spectrometry below 10 keV

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1. Early example of an interdisciplinary approach in industry: Harold F. Winters's contributions;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2017-09

2. Emergence and consequences of lateral sample heterogeneity in glow discharge spectrometry;Spectrochimica Acta Part B: Atomic Spectroscopy;2016-12

3. Exploiting Zinc Oxide Re-emission to Fabricate Periodic Arrays;ACS Applied Materials & Interfaces;2010-05-26

4. Radio-frequency glow discharge spectrometry:;Spectrochimica Acta Part B: Atomic Spectroscopy;2004-05

5. Temporal Considerations With a Microsecond Pulsed Glow Discharge;Journal of Analytical Atomic Spectrometry;1997

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