PLASMA DIAGNOSTICS OF AN rf‐SPUTTERING GLOW DISCHARGE
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1653483
Reference10 articles.
1. A System for Determining the Mass and Energy of Particles Incident on a Substrate in a Planar Diode Sputtering System
2. The Focusing of Charged Particles by a Spherical Condenser
3. Plasma Sheath Formation by Radio-Frequency Fields
4. �ber Ionisation durch metastabile Atome
5. Measurements of Ionic Species Present in rf Discharges of Argon and Argon‐Cesium
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