A System for Determining the Mass and Energy of Particles Incident on a Substrate in a Planar Diode Sputtering System
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1684763
Reference17 articles.
1. Sputtering of Surfaces by Positive Ion Beams of Low Energy
2. Ions Sputtered from Copper
3. Sputtering Ion Source for Solids
4. Mass Spectrometric Study of Neutral Particles Sputtered from Cu by 0‐ to 100‐eV Ar Ions
5. Mass spectrometer for the study of sputtering
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