Mass Spectrometric Study of Neutral Particles Sputtered from Cu by 0‐ to 100‐eV Ar Ions
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1713576
Reference17 articles.
1. Sputtering Yields of Metals for Ar+ and Ne+ Ions with Energies from 50 to 600 ev
2. Sputtering Yields at Very Low Bombarding Ion Energies
3. Sputtering of Surfaces by Positive Ion Beams of Low Energy
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