Local deposition of high-purity Pt nanostructures by combining electron beam induced deposition and atomic layer deposition
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3431351
Reference14 articles.
1. Gas-assisted focused electron beam and ion beam processing and fabrication
2. A critical literature review of focused electron beam induced deposition
3. Focused Electron-Beam-Induced Deposition of 3 nm Dots in a Scanning Electron Microscope
4. New compound quantum dot materials produced by electron-beam induced deposition
5. Nonlinear current-voltage characteristics of Pt nanowires and nanowire transistors fabricated by electron-beam deposition
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