Focused Electron-Beam-Induced Deposition of 3 nm Dots in a Scanning Electron Microscope
Author:
Affiliation:
1. Delft University of Technology, Faculty of Applied Sciences, Lorentzweg 1, 2628 CJ, Delft, The Netherlands
Publisher
American Chemical Society (ACS)
Subject
Mechanical Engineering,Condensed Matter Physics,General Materials Science,General Chemistry,Bioengineering
Link
https://pubs.acs.org/doi/pdf/10.1021/nl900717r
Reference18 articles.
1. Focused, Nanoscale Electron-Beam-Induced Deposition and Etching
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3. Growth behavior near the ultimate resolution of nanometer-scale focused electron beam-induced deposition
4. Approaching the Resolution Limit of Nanometer-Scale Electron Beam-Induced Deposition
5. The growth behavior of self-standing tungsten tips fabricated by electron-beam-induced deposition using 200keV electrons
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