Deposition of amorphous silicon films by hot-wire chemical vapor deposition
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.370202
Reference21 articles.
1. a‐Si : H produced by high‐temperature thermal decomposition of silane
2. Study on catalytic chemical vapor deposition method to prepare hydrogenated amorphous silicon
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4. Production of high‐quality amorphous silicon films by evaporative silane surface decomposition
5. Mechanisms influencing “hot-wire” deposition of hydrogenated amorphous silicon
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