Mathematical Evaluation of a-Si:H Film Formation in rf-PECVD Systems

Author:

Ganji Jabbar,Kosarian AbdolnabiORCID,Kaabi Hooman

Publisher

Springer Science and Business Media LLC

Subject

Electronic, Optical and Magnetic Materials

Reference34 articles.

1. Tian L (2013) Development of advanced thin films by PECVD for photovoltaic applications. University of Waterloo

2. Brodsky MH (1985) Amorphous semiconductors. Springer, Berlin

3. Searle T (1998) Properties of amorphous silicon and its alloys. INSPEC

4. Ganji J, Kosarian A, Kaabi H (2016) Numerical modeling of thermal behavior and structural optimization of a-Si:H solar cells at high temperatures. J Comput Electron 15:1541–1553. ISSN 1572-8137. https://doi.org/10.1007/s10825-016-0913-3

5. Schulze TF (2011) Structural, electronic and transport properties of amorphous/crystalline silicon heterojunctions. PhD dissertation, Helmholtz Zentrum Berlin June 2011

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