The oxygen effect in the growth kinetics of platinum silicides
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.328655
Reference11 articles.
1. Kinetics and mechanism of platinum silicide formation on silicon
2. An analytical study of platinum silicide formation
3. Growth rates for Pt2Si and PtSi formation under UHV and controlled impurity atmospheres
4. Reaction of thin metal films with SiO2 substrates
5. Effect of Oxidizing Ambients on Platinum Silicide Formation: II . Auger and Backscattering Analyses
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