Reaction of thin metal films with SiO2 substrates-Reference-Cited by-同舟云学术

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Reaction of thin metal films with SiO2 substrates

Published:1978-04 Issue:4 Volume:21 Page:667-675
ISSN:0038-1101
Container-title:Solid-State Electronics
language:en
Short-container-title:Solid-State Electronics

Author:

Pretorius R.,Harris J.M.,Nicolet M-A.

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference14 articles.

1. Studies of the Ti‐W Metallization System on Si

2. Thin film metallization of oxides in microelectronics

3. Silicide formation at low temperatures by metal-SiO2 interaction

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