Kinetics and mechanism of platinum silicide formation on silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1655230
Reference10 articles.
1. Structure of Evaporated PtSi on Si
2. Interdiffusion and compound formation in thin films of Pd or Pt on si single crystals
3. LOW‐TEMPERATURE MIGRATION OF SILICON IN THIN LAYERS OF GOLD AND PLATINUM
4. Solid‐Solid Reactions in Pt–Si Systems
5. Internal stresses and resistivity of low‐voltage sputtered tungsten films
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