New model of the rapid initial oxidation of silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.96246
Reference23 articles.
1. General Relationship for the Thermal Oxidation of Silicon
2. Kinetics of Thermal Growth of Ultra-Thin Layers of SiO[sub 2] on Silicon
3. A revised model for the oxidation of Si by oxygen
4. New oxide growth law and the thermal oxidation of silicon
5. On the Kinetics of the Thermal Oxidation of Silicon: I . A Theoretical Perspective
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