General Relationship for the Thermal Oxidation of Silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1713945
Reference18 articles.
1. The High Temperature Oxidation of Silicon
2. The mechanisms for silicon oxidation in steam and oxygen
3. EFFECT OF CRYSTAL ORIENTATION ON OXIDATION RATES OF SILICON IN HIGH PRESSURE STEAM
4. Oxygen exchange between silica and high pressure steam
5. Effect of an Electric Field on Silicon Oxidation
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