A revised model for the oxidation of Si by oxygen
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.90409
Reference11 articles.
1. General Relationship for the Thermal Oxidation of Silicon
2. Silicon Oxidation Studies: Analysis of SiO2 Film Growth Data
3. Silicon Oxidation Studies: Analysis of SiO2 Film Growth Data
4. Transport Processes in the Thermal Oxidation of Silicon
5. Permeation of Gaseous Oxygen through Vitreous Silica
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