Experimental evidence for the role of electrodes and oxygen vacancies in voltage nonlinearities observed in high-k metal-insulator-metal capacitors
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2803221
Reference19 articles.
1. Physical and electrical characterization of HfO2 metal–insulator–metal capacitors for Si analog circuit applications
2. Atomic layer deposition of ZrO2 on W for metal–insulator–metal capacitor application
3. High capacitance density metal-insulator-metal structure based on Al2O3–HfTiO nanolaminate stacks
4. Electrical property improvements of yttrium oxide-based metal-insulator-metal capacitors
5. Metallorganic Chemical Vapor Deposition of Sr-Ta-O and Bi-Ta-O Films for Backend Integration of High-k Capacitors
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