Metallorganic Chemical Vapor Deposition of Sr-Ta-O and Bi-Ta-O Films for Backend Integration of High-k Capacitors-Reference-Cited by-同舟云学术

Metallorganic Chemical Vapor Deposition of Sr-Ta-O and Bi-Ta-O Films for Backend Integration of High-k Capacitors

Published:2006 Issue:7 Volume:153 Page:F132
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:en
Short-container-title:J. Electrochem. Soc.

Author:

Goux L.,Vander Meeren H.,Wouters D. J.

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Reference18 articles.

1. S. Summerfelt , inThin Film Ferroelectric Materials and Devices, R. Ramesh , Editor, p. 1, Kluwer Academic Publishers, Boston (1997).

2. B. C. Hendrix and G. T. Stauf , inProceedings of the 2000 International Conference on High-Density Interconnect and Systems Packaging, p. 342, International Microelectronics and Packaging Society (2000).

3. Improvement in electrical insulating properties of 10-nm-thick Al2O3 film grown on Al/TiN/Si substrate by remote plasma annealing at low temperatures

4. High-density MIM capacitors using Al2O3 and AlTiOx dielectrics

5. T. Ishikawa, D. Kodama, Y. Matsui, M. Hiratani, T. Furusawa, and D. Hisamoto , Abstract 9.07, IEDM Symposium, IEEE (2002).

Cited by 27 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Review—Beyond the Highs and Lows: A Perspective on the Future of Dielectrics Research for Nanoelectronic Devices;ECS Journal of Solid State Science and Technology;2019

2. Dielectric Material Options for Integrated Capacitors;ECS Journal of Solid State Science and Technology;2014

3. Properties of stacked SrTiO3/Al2O3 metal–insulator–metal capacitors;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2013-01

4. Metal-Insulator-Metal capacitors with ALD grown SrTiO3: Influence of Pt electrodes;IOP Conference Series: Materials Science and Engineering;2012-12-06

5. Properties of atomic-vapor and atomic-layer deposited Sr, Ti, and Nb doped Ta2O5 Metal–Insulator–Metal capacitors;Thin Solid Films;2012-05