Electrical property improvements of yttrium oxide-based metal-insulator-metal capacitors-Reference-Cited by-同舟云学术

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Electrical property improvements of yttrium oxide-based metal-insulator-metal capacitors

Published:2006-05 Issue:3 Volume:24 Page:459-466
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Durand C.,Vallée C.,Dubourdieu C.,Kahn M.,Derivaz M.,Blonkowski S.,Jalabert D.,Hollinger P.,Fang Q.,Boyd I. W.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.2190649

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