Morphological and electrical properties of SrTiO 3 /TiO 2 /SrTiO 3 sandwich structures prepared by plasma sputtering
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
https://iopscience.iop.org/article/10.1088/1674-1056/26/1/010702/pdf
Reference27 articles.
1. Enhanced leakage current behavior of Sr2Ta2O7−x/SrTiO3 bilayer dielectrics for metal–insulator–metal capacitors
2. Preparation, microstructural and electrical characterization of SrTiO3 thin films prepared by chemical route
3. Dielectric and infrared properties of SrTiO 3 single crystal doped by 3d (V, Mn, Fe, Ni) and 4f (Nd, Sm, Er) ions
4. High performance metal-insulator-metal capacitor using a SrTiO3/ZrO2 bilayer
5. Improved electrical properties using SrTiO3/Y2O3 bilayer dielectrics for MIM capacitor applications
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Improvement of Voltage Linearity and Leakage Current of MIM Capacitors With Atomic Layer Deposited Ti-Doped ZrO2 Insulators;IEEE Transactions on Electron Devices;2023-06
2. Thin Layers of SrTiO3-TiO2 with Eutectic Composition for Photoelectrochemical Water Splitting;Coatings;2022-12-02
3. Initial growth and microstructure feature of Ag films prepared by very-high-frequency magnetron sputtering;Chinese Physics B;2017-08
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