Enhanced leakage current behavior of Sr2Ta2O7−x/SrTiO3 bilayer dielectrics for metal–insulator–metal capacitors-Reference-Cited by-同舟云学术

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Enhanced leakage current behavior of Sr2Ta2O7−x/SrTiO3 bilayer dielectrics for metal–insulator–metal capacitors

Published:2011-06 Issue:17 Volume:519 Page:5734-5739
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Kaynak C. Baristiran,Lukosius M.,Costina I.,B.Tillack ,Wenger Ch.,Ruhl G.,Blomberg T.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference28 articles.

1. SrTa2O6Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition

2. The relationship between photocatalytic activity and crystal structure in strontium tantalates

3. High frequency dielectric properties of A5B4O15 microwave ceramics

4. SrTa2O6 thin films for high-K dielectric applications grown by chemical vapor deposition on different substrates

5. Investigation of strontium tantalate thin films for high-k gate dielectric applications

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Thermal oxidation of oxynitride films as a strategy to achieve (Sr2Ta2O7)100-x(La2Ti2O7)x based oxide perovskite films with x = 1.65;Journal of the European Ceramic Society;2020-12

2. Modeling of Field Dependent Maxwell-Wagner Interfacial Capacitance for Bilayer Metal-Insulator-Metal (MIM) Capacitors;Advanced Science Letters;2018-08-01

3. Modeling of field dependent Maxwell-Wagner interfacial capacitance for bilayer metal-insulator-metal capacitors;Microwave and Optical Technology Letters;2017-09-22

4. Morphological and electrical properties of SrTiO 3 /TiO 2 /SrTiO 3 sandwich structures prepared by plasma sputtering;Chinese Physics B;2017-01

5. Growth of (Sr,La)-(Ta,Ti)-O-N perovskite oxide and oxynitride films by radio frequency magnetron sputtering: Influence of the reactive atmosphere on the film structure;Journal of Crystal Growth;2015-03

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